Analysis of electromechanical coupling coefficient of surface acoustic wave resonator

695 Words2 Pages

A surface acoustic wave (SAW) resonators are widely used for frequency selection in mobile and wireless transmission systems [1]. SAW devices consist of piezoelectric substrate, interdigital transducers (IDT) and reflectors deposited on top of the substrate [2]. When voltage is applied at the electrodes, it generates electric fields, which produces piezoelectric strains propagating in both directions as shown in Fig. 1(b). Thus, surface acoustic waves are generated through inverse piezoelectric effect [3]. The fundamental resonance frequency is determined by velocity of the acoustic wave and the wavelength as shown in (1). Therefore, the design of the IDT is critical to determine the GHz resonance frequency as shown in Fig. 1.
Discrete SAW resonators suffer from lossy interfacing and consume large area [4]. In this work, SAW resonator was developed ZnO piezoelectric material on silicon [2] to enable integration of the SAW resonator with the integrated circuits. The resonator’s IDTs were formed using metal layers present in standard 0.35 μm CMOS process to realize a 1 GHz resonator. The important parameters that affect the performance of the SAW resonator are the electromechanical coupling coefficient, k2, high quality factor, Q and low insertion loss. This paper studies the effect of different ZnO piezoelectric thickness and different distance of input and output transducer, Lc to the electromechanical coupling coefficient of the SAW resonator. Finite element simulations of the ZnO SAW resonator were conducted using COMSOLTM. A 2D geometry of SAW resonator was drawn under the piezoelectric model. Two analyses were applied: eigen frequency analysis, frequency domain analysis. A harmonic excitation was applied as sinusoidal wavefor...

... middle of paper ...

...onance frequency are trapped inside the cavity to ensure maximum reflection when the IDT is placed an integer number of half wavelength.
By varying the thickness of the piezoelectric thin film, the phase velocity of the acoustic wave also will be varied. Fig. 5 shows the SAW velocity dispersion of the surface acoustic wave resonator for normalized thickness of ZnO piezoelectric material. There is a slight decrease of phase velocity at normalized thickness of ZnO between 0.35 to 0.95.The phase velocity increases with increasing of ZnO thickness at a range from 3150 m/s to 3650 m/s.
The finding shows that the effective normalized thickness of ZnO piezoelectric layer between 0.63<(hzno/λ)<0.78 and the nearest distance of input and output transducer (Lc =1.6 um) provides highest electromechanical coupling coefficient to improve the performance of the CMOS SAW resonator.

More about Analysis of electromechanical coupling coefficient of surface acoustic wave resonator

Open Document