Essay On MEMS

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In fabrication micro-sensors and devices micro-electro-mechanical systems (MEMS) provides significant opportunities, which are borrowed it fabrication abilities from semiconductor technology.
Advances in semiconductor technologies since 1970s have paved the way for fabrication of the devices with micron dimensions. These devices were categorized under the MEMS field, which was a combination of mechanical structures with electronic readout circuits. MEMS technology has borrowed its fabrication capabilities from the growing semiconductor field and applied it to different science fields. With application of the MEMS technology in biological sciences a new field has born under the title of BioMEMS field. This field has borrowed the most advanced microfabrication techniques from its parent field, MEMS, and has applied it to the micron size world of the biological particles such as cells, viruses, and bacteria. With recent advances in the microfluidics, BioMEMS has enabled fast prototyping of the medical devices, with higher accuracy and sensitivity with lower fabrication costs and energy consumes. In addition, it has enabled new methods in manipulation of biological particles by production micron sized channels, which can be replicate of human capillary environment. With growing interest in application of the MEMS technology in biology, the study of biophysical properties of the cells has gained further importance. Cells are the most basic and functional part of the complex living systems and study of biophysical (electrical and mechanical) properties of the cells provides an inspection to physical and chemical status of biological organisms. In the past two decades, a number of new approaches are used in studying the relatio...

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4. Electrorotation
Electrorotation is a non-invasive dielectric characterization method, which is used to reveal the cells dielectric properties. ER is a phenomenon categorized under the AC electrokinetic. Ac electro kinetic is the motion of the micron size particles, induced by application of AC signals. ER is the semicircular motion of the dielectric particles due to application of an external rotating electric field. The rotating behavior of the cells is a result of interaction of the induced dipole on the cells with rotating electric field. Rotation rate of the cells are frequency dependent, and reflects the cells interior and membrane dielectric properties.
The frequency response of the cell can be measured using single cell analyses by electrorotation. In this method, the induced torque is measured as a function of applied frequency.

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