Preview
Preview

Profile Peculiarities in Semiconductor Etching: Origins & Techniques for Elimination

No Works Cited
Length: 1997 words (5.7 double-spaced pages)
Rating: Blue      
Open Document
- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -

As the dimensions of virtually every electronic device are pushed smaller and smaller, the ability to etch semiconductors with very small and very dense patterns becomes increasingly important. Increasing the pattern density naturally requires decreasing the lateral dimensions of the various structures etched. In order to maintain functionality at these sub-micron sizes, it is often necessary to etch structures with very large aspect ratios – on the order of 10-100. Dry etching using plasmas is the most efficient way to etch such structures; wet etch processes are crystal orientation dependent and it can be difficult if not impossible to obtain the desired aspect ratios.
Etching high aspect ratio structures with plasmas offers a unique challenge; maintaining the necessarily high degree of anisotropy without succumbing to a number of different profile defects has proven difficult. This paper will offer a review of the origins of the major profile defects observed and reported in literature thus far, as well as the strategies used to minimize their severity.
The most appropriate system for etching high aspect ratios in silicon is a high density low pressure (HDLP) plasma process, where the ion density is generally at least an order of magnitude larger than the earliest reactive ion etching systems. HDLP systems also offer the additional feature of being able to control ion density and ion energy independently by varying the source and bias powers, respectively. This ability means that the ion flux can be significantly more anisotropic than in the older RIE systems. Pressures have generally been reported in the range of 1-25 mTorr with ion densities on the order of 1012 cm-3.
Halogen-based chemistries are used in virtuall...


... middle of paper ...


...stretched, the larger sidewall area makes defect control even more difficult. Ions that might have impacted the bottom at a near-normal angle when the aspect ratio is small may end up scattering off the sidewall and contributing to microtrenching when the aspect ratio is large. Further work is necessary to investigate novel methods for controlling bowing, undercutting and microtrenching. Additional additives may be able to help balance passivation more precisely to eliminate bowing and undercut without producing slanted sidewalls or they may increase the directionality of the ion velocity distribution to reduce microtrenching. As plasma etching technology is pushed to the limit by the continuous pressure to miniaturize, improve performance and improve capacity, defect minimization and elimination will remain one of the most important topics in plasma processing.


Click the button above to view the complete essay, speech, term paper, or research paper








This essay is 100% guaranteed.


Title Length Color Rating  
Essay Etching Techniques - Etching is the simple art of abrading a piece of glass to make a design. Is a way to produce a “frosted” look on a glass surface. Engraving is not only used to engrave glass, but it’s also used to carve a design into the glass to give a delicate and permanent result. Etching is the way to create graphic design on a smooth piece of glass. Etching takes the time and commitment to form a beautiful piece of art and has become popular over the last 20 years. Etching is a simple art of three fundamental techniques that require patience and dedication to create a beautiful design on the glass....   [tags: art, glass, mirror]
:: 8 Works Cited
1262 words
(3.6 pages)
Strong Essays [preview]
Essay about Physics of Semiconductors - Semiconductors were being studied in laboratories as early as the 1830's. The materials were usually poor conductors if heated and often carried photoelectric properties. (Electrical production by shining light on the material.) Soon, this property of changing conductivity would become of vital importance to the world of electronics and communications. (Micron) Common semiconductors include silicon, zinc and germanium; however, silicon is by far the most widely implemented due to its abundance. Also, its reasonable speed, simple processing, and useful temperature range make it a good choice among other semiconductors....   [tags: physics conductor semiconductor] 853 words
(2.4 pages)
Better Essays [preview]
Business Profile: R.K. Trading Co. Essay - We are one of the leading manufacturers and suppliers of a wide range of Electrical Contacts for Starter and O.C.B. Carbon Brush, Brush Holder and Slip Ring Unit.// change sequencing, same as about us// Our range is acknowledged for optimum quality, efficiency and durability. We are counted as a prominent manufacturer and supplier of a comprehensive range of Electrical Contacts for Starters, O.C.B. Contacts, Carbon Brushes, Brush Holders, Slip Ring Unit and Flexible Cable. Moreover, we are also a stockist of Relay, Timers, PVC Cables, Copper Wire and Aluminum Wire....   [tags: Business Profile] 2279 words
(6.5 pages)
Powerful Essays [preview]
Business Profile: Torquo Conveyor Systems Essay - We are a renowned organization engaged in retailing and supplying of Audio & Visual Equipment, Sprung Back Scrappers and Polyurethane and Rubber Screen Decks & Liners. These are known for their durability, reliability and excellent performance. Owing to our experience of almost a decade in this field, we are engaged in offering our clients with a comprehensive range of LCD Projectors, Cordless Mike, Computers, Laptops and Audio Systems. Apart from these, we also provide Collar Mike, Sprung Back Scrapers and Polyurethane and Rubber Screen Decks & Liners....   [tags: Business Profile] 2230 words
(6.4 pages)
Powerful Essays [preview]
Business Profile: Basra Engineering Works Essay - We are one of the leading manufacturers and suppliers of Engine Valves Seats & various types of engine application. Our products are precisely engineered and are known for their durability and resistance against pressure and temperature. Backed by the industry experience of 17 years, we are the prominent manufacturers and suppliers of Engine Valves Seats & various types of engine application. Our range of products includes Engine Valve Seat Inserts, Ring and Header Work. The high quality valves that we manufacture are known for their resistance against extremely high temperature in the combustion chambers of four stroke engines that use natural gas, L.P....   [tags: Business Profile] 1789 words
(5.1 pages)
Powerful Essays [preview]
Use of Mnemonic Techniques Essay - Most people have seen movies or read books or at least heard of the famous Arthur Conan Doyles Sherlock Holmes or Agatha Christies Hercules Poirot and stood fascinated by their intellect and their stories in general. I suppose by that example was created “Mentalist” – also a detective series with lead character Patrick Jane, also a man with a great mind and intellect which leaves you with a question mark above your head. How. Aside from their excellent deductive and inductive skills as well as intuition, their ability to extract important, along with unimportant information from their “mind palace”, as Sherlock Holmes calls it, it’s rather fascinating....   [tags: Mnemonic techniques]
:: 3 Works Cited
869 words
(2.5 pages)
Better Essays [preview]
Profile Essays Profile Essays - Grandfather, Grandpa - Profile Essays Profile Essays - Grandfather, Grandpa By definition, my grandfather is handicapped. However, he doesn't act as though he is, and he certainly does not want to be treated in any special way. In fact, most of the handicapped people in society do not appreciate being treated in a way different from anyone else. They just want to be accepted as human beings. Some people become handicapped as a result of an accident. Others are born with their disabilities. My grandfather was asleep one night on a Coast Guard cutter when another ship, a destroyer, appeared in the distance....   [tags: Personal Narrative Profile] 415 words
(1.2 pages)
Strong Essays [preview]
Psychological Intervention Research Techniques Essay - This assignment presents an analysis of various Intervention research techniques. Given that Randomized Control Trials are considered to be a gold standard for testing the efficiency and efficacy of interventions, the main focus of this assignment will be on the value of other types of intervention research techniques. For the sake of convenience most of the examples in this assignment will focus on interventions for schizophrenia. Schizophrenia is a disorder which is characterized by disturbances in the content of thought, perception, affect, sense of self, motivation, and behaviour....   [tags: Psychological Research Techniques]
:: 25 Works Cited
3036 words
(8.7 pages)
Research Papers [preview]
A Semiconductor Device Essay - A Semiconductor Device A semiconductor device which conducts electric current run in one direction only. This is the simplest kind of semiconductor device, it has two terminals and a single PN junction. One diode can be used as a half-wave rectifier or four as a full-wave rectifier. electron tube, evacuated glass or metal envelope containing two electrodes, a cathode and an anode. It is used as a rectifier and as a detector in electronic circuits such as radio and television receivers. When a positive voltage is applied to the anode (or plate), electrons emitted from the heated cathode flow to the plate and return to the cathode through an external load....   [tags: Free Essays] 429 words
(1.2 pages)
Strong Essays [preview]
Essay on A Writer's Profile - A Writer's Profile Attention all passengers, please fasten your seatbelts and get ready for a ride through English 105. You are about to cruise through my writings and learn more about this course. You are sure to experience a great time and learn of what makes English 105 so exciting. Each link at the bottom of the page will direct your attention to a different piece of my work. I am definitely not Hemingway, but I have learned a lot in this class and you will get a chance to see how....   [tags: Writing Education English Essays] 1335 words
(3.8 pages)
Strong Essays [preview]